[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Batch-fabricated high Q-factor microcrystalline diamond cylindrical resonator
Saito, Daisuke, Yang, Chen, Heidari, Amir, Najar, Hadi, Lin, Liwei, Horsley, David A.Year:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7051080
File:
PDF, 3.63 MB
english, 2015