![](/img/cover-not-exists.png)
[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Two-dimensional MoS2 nanomechanical resonators freelysuspended on microtrenches on flexible substrate
Yang, Rui, Wang, Zenghui, Wang, Peng, Lujan, Rene, Ng, Tse Nga, Feng, Philip X.-L.Year:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7051099
File:
PDF, 1.19 MB
english, 2015