[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity
Zhao, Chun, Wood, Graham S., Xie, Jianbing, Chang, Honglong, Pu, Suan Hui, Chong, Harold M. H., Kraft, MichaelYear:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7051100
File:
PDF, 1.22 MB
english, 2015