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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Mass-fabrication compatible mechanism for converting in-plane to out-of-plane motion
Hotzen, Inbar, Ternyak, Orna, Shmulevich, Shai, Elata, DavidYear:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7051104
File:
PDF, 1.63 MB
english, 2015