[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - SNR improvement in amplitude modulated resonant MEMS sensors via thermal-piezoresistive internal amplification
Mahdavi, Mohammad, Ramezany, Alireza, Kumar, Varun, Pourkamali, SiavashYear:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7051108
File:
PDF, 1.13 MB
english, 2015