[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Electric contact stability and readout resolution of the antiwear probe with a groove and oil lubrication sliding system for probe-based archive memories

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