Design and development of an in-line sputtering system and...

Review of Scientific Instruments 2014 / 12 Vol. 85; Iss. 12

Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors

Biswas, A., Sampathkumar, R., Kumar, Ajaya, Bhattacharyya, D., Sahoo, N. K., Lagoo, K. D., Veerapur, R. D., Padmanabhan, M., Puri, R. K., Bhattacharya, Debarati, Singh, Surendra, Basu, S.
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4902184
Date:
December, 2014
File:
PDF, 2.08 MB
english, 2014
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