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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Damping in 1 GHz laterally-vibrating composite piezoelectric resonators
Segovia-Fernandez, Jeronimo, Piazza, GianlucaYear:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7051130
File:
PDF, 1.31 MB
english, 2015