[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Simultaneous multi-frequency switchable oscillator and FSK modulator based on a capacitive-gap MEMS disk array
Naing, Thura Lin, Rocheleau, Tristan O., Nguyen, Clark T.-C.Year:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7051136
File:
PDF, 3.06 MB
english, 2015