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Study of an Asymmetric Capacitive Discharge in Oxygen with Global Model and Langmuir Probe
Parada, S. W. C., Pessoa, R. S., Roberto, M., Petraconi, G.Volume:
49
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/04901.0357ecst
Date:
August, 2012
File:
PDF, 452 KB
english, 2012