Study of an Asymmetric Capacitive Discharge in Oxygen with...

Study of an Asymmetric Capacitive Discharge in Oxygen with Global Model and Langmuir Probe

Parada, S. W. C., Pessoa, R. S., Roberto, M., Petraconi, G.
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Volume:
49
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/04901.0357ecst
Date:
August, 2012
File:
PDF, 452 KB
english, 2012
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