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Evaluation of Pb Precursors for Liquid Injection Atomic Layer Deposition of Pb(ZrxTi1-x)O3 Thin Films
Watanabe, Takayuki, Hoffmann-Eifert, Susanne, Hwang, Cheol Seong, Waser, RainerVolume:
902
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0902-T04-07
Date:
January, 2005
File:
PDF, 264 KB
english, 2005