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Characterization of Large Particles in Fumed Silica Based CMP Slurry
Rader, W. Scott, Holt, Timothy, Tamai, KazuseiVolume:
1249
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1249-E04-08
Date:
January, 2010
File:
PDF, 1.29 MB
english, 2010