Influence of Fabrication Parameter on the Nanostructure of SiNWs under HF/AgNO3/Fe(NO3)3 Etching System
Xiao, Yong Yin, Chen, Xiu Hua, Ma, Wen Hui, Li, Shao Yuan, Li, Yu Ping, He, Jia Li, Li, Jiao, Zhang, HuiVolume:
809-810
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.809-810.93
Date:
December, 2014
File:
PDF, 2.23 MB
english, 2014