Fabrication Method of Mems Based Clamped-Clamped Resonant...

Fabrication Method of Mems Based Clamped-Clamped Resonant Magnetometer

Ghalehbeygi, Omid Tayefeh, Trabzon, Levent, Francis, Laurent, Kizil, Huseyin
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Volume:
970
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.970.106
Date:
June, 2014
File:
PDF, 597 KB
english, 2014
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