[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Thermal Stability of HfN Compounds on HfO2/SiO2 Gate Stacks
Callegari, Alessandro, Gribelyuk, Michael, Kellock, AndrewVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2356278
File:
PDF, 647 KB
english, 2006