Influence of Discharge Geometry on Power Dissipation and...

Influence of Discharge Geometry on Power Dissipation and Sheath Impedances in Silane Discharges

Spiliopoulos, Nikos, Mataras, Dimitris, Rapakoulias, Dimitris
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.4717
Date:
July, 1997
File:
PDF, 748 KB
1997
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