Influence of Discharge Geometry on Power Dissipation and Sheath Impedances in Silane Discharges
Spiliopoulos, Nikos, Mataras, Dimitris, Rapakoulias, DimitrisVolume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.4717
Date:
July, 1997
File:
PDF, 748 KB
1997