Routes to the Formation of Air Gap Structures Using PECVD

MRS Proceedings 2006 / 1 Vol. 914

Routes to the Formation of Air Gap Structures Using PECVD

Vrtis, Raymond N., Wu, Dingjun, O'Neill, Mark L, Haas, Mary K., Weigel, Scott J., Karwacki, Eugene J.
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Volume:
914
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0914-F10-02
Date:
January, 2006
File:
PDF, 852 KB
english, 2006
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