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SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II - Time reduction of MCM-D prototype realization by process control and modeling
Fremont, Helene, Ahrens, C., Saint Christophe, E., Enoeckl, B., Fathi, M., N'kaoua, G., Pellet, C., Ferretti, Ruediger, Danto, Yves, Keshavarzi, Ali, Prasad, Sharad, Hartmann, Hans-DieterVolume:
2874
Year:
1996
Language:
english
DOI:
10.1117/12.250822
File:
PDF, 869 KB
english, 1996