Challenges of Ultra Low-k Dielectric Measurement and Plasma Damage Assessment
Abell, Thomas, Lee, Jeffrey, Moinpour, MansourVolume:
914
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0914-F04-02
Date:
January, 2006
File:
PDF, 403 KB
english, 2006