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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Nano- and Micro-Metrology - Two-dimensional power spectral density measurements of x-ray optics with the Micromap interferometric microscope
Yashchuk, Valeriy V., Franck, Andrew D., Irick, Steve C., Howells, Malcolm R., MacDowell, Alastair A., McKinney, Wayne R., Ottevaere, Heidi, DeWolf, Peter, Wiersma, Diederik S.Volume:
5858
Year:
2005
Language:
english
DOI:
10.1117/12.612383
File:
PDF, 3.19 MB
english, 2005