SiNx barrier layers deposited at 250°C on a clear polymer...

MRS Proceedings 2006 / 1 Vol. 936

SiNx barrier layers deposited at 250°C on a clear polymer substrate

Cherenack, Kunigunde, Kattamis, Alex, Long, Ke, Cheng, I-Chun, Wagner, Sigurd, Sturm, James C.
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Volume:
936
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0936-L01-05
Date:
January, 2006
File:
PDF, 200 KB
english, 2006
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