ECS Transactions [ECS China Semiconductor Technology...

  • Main
  • ECS Transactions [ECS China...

ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - Characterization of Tetrahedral Amorphous Carbon (Ta-C) Thin Films with >6GPa Compressive Stress and Application in Sub-32nm p-MOSFET Strain Engineering

Ma, Xiaolong, Fu, Zuozhen, Yin, Huaxiang, Zhang, Haiqiang, Zhang, Xu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2012
Language:
english
DOI:
10.1149/1.3694345
File:
PDF, 210 KB
english, 2012
Conversion to is in progress
Conversion to is failed