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ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - Characterization of Tetrahedral Amorphous Carbon (Ta-C) Thin Films with >6GPa Compressive Stress and Application in Sub-32nm p-MOSFET Strain Engineering
Ma, Xiaolong, Fu, Zuozhen, Yin, Huaxiang, Zhang, Haiqiang, Zhang, XuYear:
2012
Language:
english
DOI:
10.1149/1.3694345
File:
PDF, 210 KB
english, 2012