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Thinning Technology of Patterned Silicon Wafer for Micro Pressure Sensor
Nagano, T., Touge, Mutsumi, Watanabe, JunjiVolume:
291-292
Year:
2005
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.291-292.419
File:
PDF, 1.88 MB
english, 2005