High-Productivity Combinatorial PVD and ALD Workflows for Semiconductor Logic & Memory Applications
Hashim, Imran, Lang, Chi-I, Chen, Hanhong, Tong, Jinhong, Mathur, Monica, Phatak, Prashant, Kuse, Ronald, Malhotra, Sandra, Shanker, Sunil, Rui, XiangxinVolume:
1159
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1159-G01-02
Date:
January, 2009
File:
PDF, 752 KB
english, 2009