[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Investigation of Silicon-Germanium Films Deposited by Plasma-Enhanced Chemical Vapor Deposition Using Laser Assistance
Lee, Ching-Ting, Cheng, Jun-Hung, Chen, Yao-Ming, Tsai, Tai-ChengVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2355809
File:
PDF, 411 KB
english, 2006