Plasma immersion ion implantation for improvement of...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 1999 Vol. 17; Iss. 2

Plasma immersion ion implantation for improvement of mechanical properties of AISI M2 steel

Uglov, V. V., Khodasevich, V. V., Kuleshov, A. K., Fedotova, J. A., Rusalsky, D. P., Guenzel, R., Richter, E.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.590665
File:
PDF, 649 KB
english, 1999
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