Raman Investigation of Stress Relaxation at the 3C-SiC/Si...

Raman Investigation of Stress Relaxation at the 3C-SiC/Si Interface

Bluet, Jean Marie, Falkovsky, L.A., Planes, N., Camassel, Jean
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Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.395
File:
PDF, 302 KB
1998
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