Optical Emission Spectroscopy of Low-Discharge-Power...

Japanese Journal of Applied Physics 2010 / 8 Vol. 49; Iss. 8

Optical Emission Spectroscopy of Low-Discharge-Power Magnetron Sputtering Plasmas Using Pure Tungsten Target

Matsunaga, Takeaki, Ohshima, Tamiko, Kawasaki, Hiroharu, Kaneko, Tatsuya, Yagyu, Yoshihito, Suda, Yoshiaki
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Volume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.08JF04
Date:
August, 2010
File:
PDF, 263 KB
english, 2010
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