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Improving the Design of the Shield for the Electric Field in SiC-Based Schottky-Rectifiers and Ion-Implantation Cascades by SPM Dopant-Imaging
Bartolf, H., Gysin, U., Glatzel, T., Rossmann, H.R., Jung, T.A., Reshanov, S.A., Schöner, A., Meyer, E.Volume:
148
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.04.011
Date:
December, 2015
File:
PDF, 1.41 MB
english, 2015