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[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Finite-Elements Simulation for True 3D Structure Generation of Anisotropic Electrochemical Wet-Etching Processes
Kroener, Michael, Ivanov, Alexey, Goldschmidtböing, Frank, Mescheder, Ulrich, Woias, PeterYear:
2009
Language:
english
DOI:
10.1149/1.3247995
File:
PDF, 512 KB
english, 2009