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SPIE Proceedings [SPIE Ninth International Symposium on Gas Flow and Chemical Lasers - Heraklion, Greece (Monday 21 September 1992)] 9th International Symposium on Gas Flow and Chemical Lasers - Excimer laser treatment of aluminum nitride
Tsetsekou, Athena, Zampetakis, Th., Stournaras, C. J., Patentalaki, A., Hontzopoulos, Elias I., Fotakis, Costas, Kalpouzos, Costas, Papazoglou, Theodore G.Volume:
1810
Year:
1993
Language:
english
DOI:
10.1117/12.144561
File:
PDF, 494 KB
english, 1993