InAs Planar Nanowire Gate-All-Around MOSFETs on GaAs Substrates by Selective Lateral Epitaxy
Zhang, Chen, Choi, Wonsik, Mohseni, Parsian K., Li, XiulingVolume:
36
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2015.2429680
Date:
July, 2015
File:
PDF, 419 KB
english, 2015