SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Metrology, Inspection, and Process Control for Microlithography XXVIII - Highly effective and accurate weak point monitoring method for advanced design rule (1x nm) devices

Cain, Jason P., Sanchez, Martha I., Ahn, Jeongho, Seong, ShiJin, Yoon, Minjung, Park, Il-Suk, Kim, HyungSeop, Ihm, Dongchul, Chin, Soobok, Sivaraman, Gangadharan, Li, Mingwei, Babulnath, Raghav, Lee,
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Volume:
9050
Year:
2014
Language:
english
DOI:
10.1117/12.2046651
File:
PDF, 404 KB
english, 2014
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