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Electron heating modes and frequency coupling effects in dual-frequency capacitive CF4 plasmas
Derzsi, Aranka, Schüngel, Edmund, Donkó, Zoltán, Schulze, JulianVolume:
13
Language:
english
Journal:
Open Chemistry
DOI:
10.1515/chem-2015-0044
Date:
January, 2014
File:
PDF, 5.12 MB
english, 2014