Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2003 Vol. 21; Iss. 3
![](/img/cover-not-exists.png)
Focused ion beam induced surface amorphization and sputter processes
Basnar, B., Lugstein, A., Wanzenboeck, H., Langfischer, H., Bertagnolli, E., Gornik, E.Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1565345
File:
PDF, 643 KB
english, 2003