Nickel deposition behavior on n-type silicon wafer for fabrication of minute nickel dots
Nao Takano, Daisuke Niwa, Taro Yamada, Tetsuya OsakaVolume:
45
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0013-4686(00)00442-4
File:
PDF, 846 KB
english, 2000