Site-Defined Micropatterning Using Atomic Force Microscopic Lithography
Choi, In Hee, Kim, Young Hun, Kim, Chang Mook, Kim, Jin Soo, Choi, Kyung Hee, Yi, Jong HeopVolume:
277-279
Year:
2005
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.277-279.903
File:
PDF, 902 KB
english, 2005