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Ultra-Low Energy Ion Implantation of Si into HfO2 and HfSiO-based Structures for Non Volatile Memory Applications
Gloux, Florence, Coulon, Pierre-Eugène, Groenen, Jesse, Schamm, Sylvie, Benassayag, Gerard, Pecassou, Beatrice, Slaoui, Abdelilah, Sahu, Bhabani, Carrada, Marzia, Lhostis, Sandrine, Bonafos, CarolineVolume:
1250
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1250-G01-07
Date:
January, 2010
File:
PDF, 292 KB
english, 2010