Metallorganic Chemical Vapor Deposition of Sr-Ta-O and Bi-Ta-O Films for Backend Integration of High-k Capacitors
Goux, L., Vander Meeren, H., Wouters, D. J.Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2198008
File:
PDF, 242 KB
english, 2006