Impact of sputter deposition parameters on molybdenum nitride thin film properties
Stöber, L, Konrath, J P, Krivec, S, Patocka, F, Schwarz, S, Bittner, A, Schneider, M, Schmid, UVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/7/074001
Date:
July, 2015
File:
PDF, 1.73 MB
english, 2015