![](/img/cover-not-exists.png)
Ti–Si–C Films Formed by Dual Beam Ion Assisted Deposition
Twardowska, Agnieszka, Rajchel, Bogusław, Jaworska, LucynaVolume:
66
Language:
english
Journal:
Advances in Science and Technology
DOI:
10.4028/www.scientific.net/AST.66.11
Date:
October, 2010
File:
PDF, 4.61 MB
english, 2010