SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Miniaturized Systems with Micro-Optics and Micromechanics II - Ferroelectric PZT thin films on Si and SBN substrates
Neurgaonkar, Ratnakar R., Nelson, Jeffrey G., Lin, Joey, Cheng, James, Motamedi, M. Edward, Hornbeck, Larry J., Pister, Kristofer S. J.Volume:
3008
Year:
1997
Language:
english
DOI:
10.1117/12.271434
File:
PDF, 385 KB
english, 1997