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Effect of Substrate Constraint on Stress-Induced Deformation Mechanism of Tungsten Thin Film
Sun, H.L., Ma, Fei, Song, Zhong Xiao, Li, Yan Huai, Xu, Ke WeiVolume:
89-91
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.89-91.539
Date:
January, 2010
File:
PDF, 11.94 MB
english, 2010