Diffusion and Solubility of Iridium in Silicon

Diffusion and Solubility of Iridium in Silicon

Obeidi, S., Stolwijk, Nicolaas
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Volume:
194-199
Year:
2001
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.194-199.635
File:
PDF, 421 KB
2001
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