Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 2
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Stable field emission of single B-doped Si tips and linear current scaling of uniform tip arrays for integrated vacuum microelectronic devices
Serbun, Pavel, Bornmann, Benjamin, Navitski, Aliaksandr, Müller, Günter, Prommesberger, Christian, Langer, Christoph, Dams, Florian, Schreiner, RupertVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4765088
File:
PDF, 2.15 MB
english, 2013