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SiO[sub 2] Incorporation Effects in Ge[sub 2]Sb[sub 2]Te[sub 5] Films Prepared by Magnetron Sputtering for Phase Change Random Access Memory Devices
Ryu, Seung Wook, Oh, Jin Ho, Choi, Byung Joon, Hwang, Sung-Yeon, Hong, Suk Kyoung, Hwang, Cheol Seong, Kim, Hyeong JoonVolume:
9
Year:
2006
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2205120
File:
PDF, 222 KB
english, 2006