![](/img/cover-not-exists.png)
[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - A Study on B Atomic Layer Formation for B-Doped Si
Ishibashi, Kiyohisa, Sakuraba, Masao, Murota, J., Inokuchi, Yasuhiro, Kunii, Yasuo, Kurokawa, Harushige KurokawaVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2355881
File:
PDF, 306 KB
english, 2006