SPIE Proceedings [SPIE ISMA '97 International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 23 June 1997)] Microelectronic Packaging and Laser Processing - Influence of laser deposition conditions on optical properties of silicon composite films
Indutnyi, Ivan Z., Kaganovich, E. B., Kudryavtsev, A. A., Manoilov, E. G., Svechnikov, George S., Swee, Yong Khim, Zheng, HongYu, Chen, Ray T.Volume:
3184
Year:
1997
DOI:
10.1117/12.280577
File:
PDF, 406 KB
1997