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Experiments and Modeling of Si-Ge Interdiffusion with Partial Strain Relaxation in Epitaxial SiGe Heterostructures
Dong, Y., Mooney, P. M., Cai, F., Anjum, D., Ur-Rehman, N., Zhang, X., (Maggie) Xia, G.Volume:
3
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0041410jss
Date:
July, 2014
File:
PDF, 1.22 MB
english, 2014