Deposition Profile Control of Carbon Films on Patterned...

MRS Proceedings 2009 / 1 Vol. 1222

Deposition Profile Control of Carbon Films on Patterned Substrates using a Hydrogen-assited Plasma CVD Method

Nomura, Takuya, Koga, Kazunori, Shiratani, Masaharu, Setsuhara, Yuichi, Sekine, Makoto, Hori, Masaru
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Volume:
1222
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1222-DD05-16
Date:
January, 2009
File:
PDF, 250 KB
english, 2009
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